PRODUCT
Crystal Si solarcell
SOLTEX
SPECIFICATIONS
| ITEM | SPECIFICATION |
|---|---|
| Configuration | Loader → Pre-cleaning bath → DI rinse #1 → KOH bath → DI rinse #2 → Acid #1 → DI rinse #3 → Acid #2 → DI rinse #4 → Hot DI rinse → Hot air dry → Unloader |
| Substrate size | 156mm×156mm wafer |
| Cassette (LSC) | Max. 100 wafers loading |
| LSC transfer | Robot |
| System control | Automatic process control by PC |