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SPUTTER

PRODUCT
INTRODUCTION

Process Data

SEM Results

Target Material : RuO2
Sample size : 4 ”
R.F power : 200W
Working Pressure : 7mTorr
Gas : Ar flow
Gun : 4 inch

XPS Results

Cu under 5mTorr Ar @ 100W, 1 min.

SPUTER

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SPUTER

Rms rough	Ave rough	Median Ht	Mean Ht	Surface area	Volume
7.2099Å	4.8465Å	28.35Å	27.771Å	20.183㎛2	0.056024㎛2

MOON series (Cu & Ag SEM images )

MOON series

MOON series

MOON series

MOON series

PZT target process data

Process condition

Target material : PZT
Ar : 25sccm
W/P : 5mTorr
Power : RF 100W
Temp : R.T

Process condition

TERRA – P

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대표사진

TERRA – P

TERRA – T

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대표사진

TERRA – T

TERRA – R

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대표사진

TERRA – R

TERRA – C

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대표사진

TERRA – C

TERRA-MOON

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대표사진

TERRA-MOON

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