PRODUCT
Crystal Si solarcell
SOLDOP
SPECIFICATIONS
| ITEM | SPECIFICATION |
|---|---|
| Frame structure | 1 stack 1 tube type |
| Substrate size | 156mm×156mm wafer |
| Process tube | Ball-joint type Quartz reactor |
| Load station | Automatic loading/unloading by LM guide (Soft landing type) Max. 400 wafers loading (included dummy wafers) |
| Furnace heater | Max. 1,200℃ (at heater surface) 6-zone temperature control |
| Process gas | N2, O2 gas for process N2 gas for source carrier N2 gas for purge |
| Source | 500cc Quartz canister for POCl3 source feeding |
| System control | Automatic process control by PC |